• 產品介紹

維修保養服務與零組件

作業環境與設施:CNC電腦洗床,車床金屬加工設施,噴砂除污設施,無塵室 class 5000 (0.3um) 潔淨要求。

量測儀器與品質保證:自動控制量試儀器、閥門角度校正,真空氦氣測漏儀器 He Leakage Detector。

VAT / MKS Butterfly Valve


AKT – MKS
 valve

653B-22815
  

VAT Butterfly valve ( S61)

253B-11010
  

VAT Butterfly valves ( S612 )

Vacuum Isolation Valve


CKD Isolation Valve
  

SMC Isolation Valve
  

IKC Valve
 
  

MKS slow vent valve
  

MDC Isolation
Gate Valve
AV-303-PAA-LEFT

Cylinder/Slit valve


Compact Dual
cylinder

PHD Daul
cylinder

Compact
cylinder

SMC CDQ2B125-
XC1 cylinder  

Compact slit
valve

Vacuum Gate Valve


Pansonic AC SERVO DRIVER

AKT 15/25K
 

MDC Valve
  

Fast Vacuum Valve

Slow Vacuum Valve

SMC Vacuum Valve & V-TEX Gate Valve ( YAC Etch)


SMC High Vacuum Gate Valve

XMD-63-DL-M9
 
 

ANELVA PVD SMC Bellow
Dual-Cylinder

Chamber Gate Valve
(640×55)

Load-lock Gate Valve (640x100)
 

Others Repair Service


昭和電機
 Showa Denki
Blower
ME-125H

TAIKO Vacuum Pump
TRIC-1800D4P
TAIKO Vacuum Pump
TRIC-1800D4P

ORBOTECH
熱影像幫浦機
 
 

悠貝克
Pump
 
 

 

 
冷凍式真空泵解體檢修(Cryopump overhaul)::ULVAC / ANELVAC / BROOKS 等廠牌


ULVAC U6-22


ANELVAC
 CAP80-16 P160-401 


CTI 
    TORR SERIES     

  
CTI
 ON BOARD 4-400 

  

ELMO 伺服驅動器:CEL[A10/100-C6, A10/200-C6,3/100-C6] & COR-A9/230-C6 


CEL-A10/100-C6

CEL-A10/200-C6

CEL-3/100-C6

COR-A9/230-C6

 

各類鼓風機維修